Title:
METHOD AND APPARATUS FOR MEASURING OPTICAL CHARACTERISTICS OF THIN FILM
Document Type and Number:
Japanese Patent JPS63300933
Kind Code:
A
Inventors:
HANSUUYOAHIMU JIIKUMUNTO
HORUSUTO SHIYUBUITSUKAA
HORUSUTO SHIYUBUITSUKAA
Application Number:
JP12410587A
Publication Date:
December 08, 1988
Filing Date:
May 22, 1987
Export Citation:
Assignee:
LEYBOLD HERAEUS GMBH & CO KG
International Classes:
G01B11/06; G01M11/00; G01N21/27; G01N21/59; (IPC1-7): G01B11/06; G01M11/00; G01N21/27; G01N21/59
Attorney, Agent or Firm:
Toshio Yano
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