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Title:
METHOD OF DETECTING STAIN FLAW, AND STAIN FLAW DETECTOR
Document Type and Number:
Japanese Patent JP2005140655
Kind Code:
A
Abstract:

To provide a stain flaw detecting method capable of detecting a stain flaw with high precision, and a stain flaw detector.

This method of detecting stain flaw; includes a process of performing filtration processing for emphasizing the stain flaw of an inspection image and a process for detecting the presence of the stain flaw or evaluating the degree of stain flaw, on the basis of the inspection image subjected to filtration processing. In a filtration processing, convolution operation is performed by a first filter for calculating the difference in the luminance between longitudinal components, a second filter for calculating the difference in the luminance between lateral components, a third filter for calculating the difference in the luminance between +45 degree components and a fourth filter for calculating the difference in the luminance between -45 degree components to form an image having the value of the filter, wherein the absolute value of the operation result shows a minimum value, as the luminance value.


Inventors:
KOJIMA KOICHI
ICHIKAWA HIRONARI
MURAKAMI TAKUSHI
Application Number:
JP2003377916A
Publication Date:
June 02, 2005
Filing Date:
November 07, 2003
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G01M11/00; G06T1/00; G06T7/60; G01N21/88; (IPC1-7): G01N21/88; G01M11/00; G06T1/00; G06T7/60
Attorney, Agent or Firm:
Hisao Kobayashi
Souji Sasaki
Saburo Kimura
Noboru Omura