PURPOSE: To easily collect even a minute sample whose size is from several to several tens micra by providing an object stage, a manipulator and a cutting edge.

CONSTITUTION: A film is fixed onto an object stage 5, and by operating a first manipulator 7, a cutting edge 9 is brought into contact with the film. Subsequently, when the cutting edge 9 is moved in parallel to the film, a foreign matter protruded from the surface of the film is scooped onto the cutting edge 9 as a minute sample. In this regard, when the minute sample becomes near ten micra, it adheres to the cutting edge 9 by Coulomb's force of static electricity. When the minute sample is collected onto the cutting edge 9, a KBr plate is placed on the object stage 5, and the cutting edge 9 is placed thereon. Subsequently, by operating an ion generator 14, the periphery of the cutting edge 9 becomes an ionized atmosphere, and Cloulomb's force between the cutting edge 9 and the minute sample is decreased. Next, when the surface of the cutting edge 9 is rubbed with a fibrous object 12 of the tip of an operating arm 11 by operating a second manipulator 10, the minute sample is pushed by the fibrous object 12 and separated easily from the cutting edge 9 and moved onto the KBr plate.