Title:
METHOD AND DEVICE FOR DRIVING CONTROL
Document Type and Number:
Japanese Patent JPH03286317
Kind Code:
A
Abstract:
PURPOSE:To reset a mobile object to its original target position without stopping the movement processing even in an oscillation state of the mobile object, and to carry on the operations of other processing systems by providing an auxiliary function generating means. CONSTITUTION:The auxiliary function generating means F1 - Fn generate the auxiliary target position signals SP1 - SPn and the auxiliary target velocity signals SV1 - SVn based on an action release signal SR, a reference clock phi, an error detection signal SE, and a position detection signal SPR which are supplied from a control function generating means 11. The means 11 inactivates the outputs of both signals SP and SV and also outputs the signal SR to a 1st auxiliary function generating means F1 with input of the signal SE. The means F1 outputs the signals SP1 and SV1. Then the drive of a mobile object 18 is controlled so that both velocity and position deviations of the object 18 are set to '0'. Thus the object 18 can be reset to its original control target position and velocity.
Inventors:
WATANABE YOSHIO
Application Number:
JP8800190A
Publication Date:
December 17, 1991
Filing Date:
April 02, 1990
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/30; G05D3/12; H01L21/027; (IPC1-7): G05D3/12; H01L21/027
Domestic Patent References:
| JPS59123908A | 1984-07-17 | |||
| JPS5981040A | 1984-05-10 |
Attorney, Agent or Firm:
Keizo Okamoto
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