PURPOSE: To conveniently evaluate the capacity of a gas refiner by holding a tank wherein desired gaseous impurities are enclosed at a pressure higher than that of the refiner, exhausting the gaseous impurities into the refiner, and measuring the exhaustion capacity of the gaseous impurities into the refiner.
CONSTITUTION: The pressure in the gas refiner 3 is decreased, and the refiner 3 is hermetically sealed. The desired gaseous impurities enclosed in the tank 12 held at a pressure higher than that in the refiner 3 is exhausted into the hermetically sealed refiner 3. The exhaustion capacity of the gaseous impurities into the refiner 3 is then measured, and the capacity of the refiner 3 is evaluated. As a result, the capacity of the refiner for a carrier gas such as gaseous Ar can be conveniently evaluated in a short time.
WATANABE TORU
OKUMURA KATSUYA
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