Title:
METHOD AND DEVICE FOR FINISHING SURFACE OF MATERIAL BY USING ULTRAVIOLET RAY OR LIGHT BEAM WITH WAVELENGTH SHORTER THAN THAT OF ULTRAVIOLET RAY, AND METHOD AND DEVICE FOR MANUFACTURING PRODUCT FORMED OF HIGH POLYMER COMPOUND BY USING THESE METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP3697508
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and a device for smoothly finishing the surface of a micro structural body at an optical level by improving a micro roughness on the surface of the micro structural body by defects of mask edge shape and a reaction in a resist when the micro structural body is finished by X-ray lithography or photo lithography including a lithography step in a LIGA process.
SOLUTION: This method of finishing the surface of the material comprising a light beam radiating step 1 for radiating ultrasonic ray or a light beam with a wavelength shorter than that of ultrasonic ray on the surface of the finished material, and a heating processing step 2 for heating the material to melt the surface thereof, a solvent processing step 3 for melting the surface of the material by acting solvent on the material, or both the heating processing step 2 and the solvent processing step 3.
Inventors:
Tabata Osamu
Application Number:
JP2002039595A
Publication Date:
September 21, 2005
Filing Date:
February 18, 2002
Export Citation:
Assignee:
Kansai TLO Co., Ltd.
International Classes:
G03F7/20; B81C1/00; B81C99/00; (IPC1-7): B81C1/00; B81C5/00; G03F7/20
Domestic Patent References:
| JP63090893A | ||||
| JP2000035500A |
Attorney, Agent or Firm:
Mitsuhiko Watanabe
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