Title:
METHOD OF AND DEVICE FOR FOCUSING AND CORRECTING ABERRATION OF ELECTRONIC CAPACITOR LENS
Document Type and Number:
Japanese Patent JPS551100
Kind Code:
A
Abstract:
A method and device for correcting errors and setting the focus of an electron optical condenser of a microprojector which condenser produces a bundle of axially parallel electron rays for illuminating a large surface transmission mask to create an image which is projected by means of an electron optical lens system on a surface of a wafer characterized by placing an annular field stop or diaphragm which passes a bundle of rays having a ring-shaped or annular cross section and recording the image in a plane preferably adjacent the surface of the wafer. The recording can be accomplished by utilizing a photographic plate or by utilizing a detector arrangement. When the image on the recording unit is the same size and shape as the annular field stop, then the electron optical condenser has the correct focal length and the source is disposed on the front focal plane.
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Inventors:
KURAUSU ANGAA
YURUGEN FUROOJIEN
BURUKUHARUTO RISHIYUKE
YURUGEN FUROOJIEN
BURUKUHARUTO RISHIYUKE
Application Number:
JP7512479A
Publication Date:
January 07, 1980
Filing Date:
June 14, 1979
Export Citation:
Assignee:
SIEMENS AG
International Classes:
H01J37/153; H01J37/21; H01J37/30; H01L21/027; (IPC1-7): H01J37/153; H01J37/21; H01L21/30
Next Patent: JPS551101