Title:
METHOD AND DEVICE FOR INSPECTING FOREIGN MATTER
Document Type and Number:
Japanese Patent JP3159271
Kind Code:
B2
Abstract:
PURPOSE: To excellently detect foreign matters without relying on the transmittance of a pellicle at the time of detecting the foreign matters by scanning the surface of a substrate to be inspected mounted with the pellicle.
CONSTITUTION: A pellicle transmittance measuring section 1 is provided separately from a foreign matter inspecting section 2 and the section 1 measures the transmittance Ti0 (x) and Ts0 (x) of a reference pellicle and stores the measured transmittance in a first register 20. The section 2 stores a sensitivity correcting value C0 (x) found from the signal obtained by receiving scattered light from the standard particle of a reticle through the reference pellicle in a second register 25. Detecting signals S2 (x) obtained by the section 2 are corrected based on the transmittance of the reference pellicle and sensitivity correcting value.
Inventors:
Hideyuki Tashiro
Tsuneyuki Hagiwara
Tsuneyuki Hagiwara
Application Number:
JP17378292A
Publication Date:
April 23, 2001
Filing Date:
June 08, 1992
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01N21/88; G01N21/93; G01N21/94; G01N21/956; G03F1/84; H01L21/027; H01L21/66; (IPC1-7): G01N21/956; G03F1/08; H01L21/027
Domestic Patent References:
| JP63208746A | ||||
| JP63238454A | ||||
| JP1187437A | ||||
| JP227240A |
Attorney, Agent or Firm:
Satoshi Ohmori