Title:
METHOD AND DEVICE FOR POLISHING PENETRATION PASSAGE OF THREE-DIMENSIONAL STRUCTURE
Document Type and Number:
Japanese Patent JP2016179515
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a polishing method of a penetration passage capable of polishing more properly a penetration passage of a three-dimensional structure with a sufficient amount of abrasive grains without using a cylinder.SOLUTION: Polishing of a penetration passage is carried out by circulating a polishing fluid through the penetration passage from a charged closed vessel into which the polishing fluid containing abrasive grains and liquid is charged. Especially, a dispersion treatment for dispersing abrasive grains into liquid in the charged closed vessel into which gas for circulating the polishing fluid into the penetration passage is supplied.SELECTED DRAWING: Figure 1
Inventors:
ABE SATOSHI
TANAKA KENICHI
UCHINONO YOSHIYUKI
TANAKA KENICHI
UCHINONO YOSHIYUKI
Application Number:
JP2015059973A
Publication Date:
October 13, 2016
Filing Date:
March 23, 2015
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
B24B31/00; B24B31/12; B24B49/08
Domestic Patent References:
| JPS4825996A | 1973-04-04 | |||
| JP2002337047A | 2002-11-26 | |||
| JP2000198062A | 2000-07-18 | |||
| JP2005059115A | 2005-03-10 | |||
| JPH11197946A | 1999-07-27 | |||
| JP2011067902A | 2011-04-07 |
Foreign References:
| WO2009105043A1 | 2009-08-27 | |||
| WO1995011109A1 | 1995-04-27 |
Attorney, Agent or Firm:
Samejima Mutsumi
Haruhiko Ema
Ken Takaoka
Haruhiko Ema
Ken Takaoka
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