METHOD AND DEVICE FOR STORING HIGH CONCENTRATION OZONE- CONTAINING GAS AND METHOD AND DEVICE FOR OXIDATION PROCESSING

Title:

METHOD AND DEVICE FOR STORING HIGH CONCENTRATION OZONE- CONTAINING GAS AND METHOD AND DEVICE FOR OXIDATION PROCESSING

Document Type and Number:

Japanese Patent JP2001139311

Kind Code:

A

Abstract:

To obtain a storage method and storage device for a high concentration ozone-containing gas and a method and device for oxidation processing, which are capable of preventing the decrease of the concentration of ozone gas and effectively utilizing the storing oxidation power.

The high concentration ozone-containing gas is stored by a process for adsorbing high purity ozone gas on a target substrate as solid ozone by cooling the target substrate composed of a material arranged in a vacuum chamber, inert to ozone and having good heat conductivity and supplying the high purity ozone gas on the target substrate. The storage and fixed ozone is emitted as ozone beam toward the surface of a sample to be oxidized by the laser beam irradiation or the heating of the surface.

Inventors:

ICHIMURA SHINGO
NONAKA HIDEHIKO
NISHIGUCHI TETSUYA
MIYAMOTO MASAHARU
MORIKAWA YOSHIKI
OISHI KAZUSHIRO
HANAKURA MITSURU

Application Number:

JP31803899A

Publication Date:

May 22, 2001

Filing Date:

November 09, 1999

Export Citation:

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Assignee:

NAT INST OF ADVANCED IND SCIEN
MEIDENSHA ELECTRIC MFG CO LTD

International Classes:

F17C11/00; C01B13/10; H01L21/31; H01L21/316; (IPC1-7): C01B13/10; F17C11/00; H01L21/31

Attorney, Agent or Firm:

Fujiya Shiga (1 person outside)
Fujiya Shiga (1 person outside)

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