PURPOSE: To provide a large optical electron signal intensity for making highly precise chemical analysis of condition at minute area by enabling observation of optical electron spectrum without analyzing the kinematic energy of optical electrons.

CONSTITUTION: An X-ray monochromated by a spectroscope 2 is converged on the surface of a specimen 5 using an optical system 4. The spectroscope 2 is controlled by a control device 8 and, while the injected X-ray energy is varied, optical electrons emitted from the surface of the specimen 5 are detected by a detector 7 without analyzing the kinematic energy of the electrons.