To make a work shape arbitrarily controllable of a workpiece, in surface polishing which performs polishing of a surface of the flat plate-shaped workpiece.
In surface polishing wherein a flat plate-shaped workpiece 5 is supported form a reverse surface on a polishing head 6 while pressing a surface thereof to a rotary polishing surface plate 3 on which a polishing cloth 4 is stuck and the surface of the workpiece 5 is polished in a surface of a polishing head 21 opposed to the reverse surface of the workpiece, a plurality of through holes 31a, 31b, 31c are concentrically arranged, also a group of the through holes is constituted in each concentric circle, by each of these groups, by adjusting a delivery pressure of air, a work shape of the workpiece 5 is controlled.
HIRATA HIRONOBU
NISHIHARA HIROMI
SUZUKI HIROYUKI
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