Title:
METHOD AND DEVICE FOR VAPOR GROWTH
Document Type and Number:
Japanese Patent JPH03226577
Kind Code:
A
Abstract:
PURPOSE: To surely clean a particle in a short time when vapor growth is carried out by an electric discharge generated between a couple of main electrodes by generating the electric discharge from an auxiliary electrode set at a specified position.
CONSTITUTION: Vapor growth is conducted on a body to be treated by an electric discharge generated between a couple of electrodes 1a and 1b in a chamber 10 of the device, and auxiliary electrodes 2a and 2b are provided. An electric discharge 4c is generated by the auxiliary electrode 2 at a desired position to be cleaned to surely clean the particle.
Inventors:
MUROYAMA MASAKAZU
Application Number:
JP1994290A
Publication Date:
October 07, 1991
Filing Date:
January 30, 1990
Export Citation:
Assignee:
SONY CORP
International Classes:
C23C16/44; C23C16/50; (IPC1-7): C23C16/44; C23C16/50
Attorney, Agent or Firm:
Toru Takatsuki