Title:
METHOD FOR ELIMINATING HARMFUL EFFECTS OF NITROGEN TRIFLUORIDE AND HARMFUL EFFECTS ELIMINATION DEVICE
Document Type and Number:
Japanese Patent JPH1157409
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To eliminate fear that a reaction line might be blocked by providing an adsorption installation filled with an adsorbent in the downstream of a reactor in which a catalyst is packed and maintaining a space between the outlet of the reactor and the inlet of the adsorption installation through adsorbing and removing a fluorocompound to be produced by a chemical reaction, at a specific temperature or higher. SOLUTION: Nitrogen is supplied from an additional supply line 14 for dilution nitrogen and is added to an exhaust gas containing NF3 to enter from an exhaust gas line 6 through a flow control device 15 and an additional supply line 16 for dilution nitrogen. In addition, hydrogen is supplied from a reductive gas supply line 17 and then is added to the exhaust gas containing NF3 through a flow control device 18 and a reductive gas supply line 19. Further, a fluorocompound produced from a mixture of nitrogen and hydrogen by an NF3 reduction reactor 7 is adsorbed and removed by an absorbent packed in an adsorption installation 12 provided in the downstream of the reactor 7. In this case, the space between the outlet of the reactor 7 and the inlet of the adsorption installation 12 is maintained at a temperature of 150 deg.C or higher.
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Inventors:
JINBO TAKASHI
YASUTAKE TAKESHI
HARADA ISAO
WACHI HIROKO
YASUTAKE TAKESHI
HARADA ISAO
WACHI HIROKO
Application Number:
JP22985397A
Publication Date:
March 02, 1999
Filing Date:
August 26, 1997
Export Citation:
Assignee:
MITSUI CHEMICALS INC
International Classes:
B01D53/34; B01D53/68; B01D53/86; (IPC1-7): B01D53/86; B01D53/34; B01D53/68
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