Title:
METHOD OF FORMING COLOR FILTER
Document Type and Number:
Japanese Patent JPH01217303
Kind Code:
A
Abstract:
PURPOSE:To improve the work efficiency, and the position accuracy of a filter by forming a pattern by applying a photoresist to the surface of a substrate, and subsequently, affixing a filter film to its surface by applying or printing a filter paint of an inorganic pigment and immersing the substrate into a solvent of the photoresist. CONSTITUTION:A photoresist is applied to a semiconductor substrate 1, and thereafter, a photoresist 4 on a light detecting element 2 for detecting a color is eliminated by mask exposure and development. Subsequently, an inorganic pigment 5 is applied onto a pattern of the photoresist by a printing method or a spin coating method. Next, by immersing the substrate into a solvent of the photoresist, the photoresist film is eliminated together with the inorganic pigment 5 which has been applied onto said film and a pattern of a color filter 6 is obtained. Since the inorganic pigment can be used, the filter film itself becomes stable chemically, as well, comparing with a dyed filter film. In such a way, a pattern of a stable filter film can be formed with high accuracy and efficiently on an image sensor substrate.
Inventors:
YAMAGUCHI KAZUFUMI
YAMAMOTO YASUNAGA
HASHIMOTO HISATSUGU
KADOMA AKIRA
YAMAMOTO YASUNAGA
HASHIMOTO HISATSUGU
KADOMA AKIRA
Application Number:
JP4266088A
Publication Date:
August 30, 1989
Filing Date:
February 25, 1988
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G02B5/20; H01L27/14; H01L31/02; H04N9/07; (IPC1-7): G02B5/20; H01L27/14; H01L31/02; H04N9/07
Domestic Patent References:
| JPS62163002A | 1987-07-18 | |||
| JPS58224310A | 1983-12-26 |
Attorney, Agent or Firm:
Tomoyuki Takimoto