Title:
METHOD FOR FORMING DIFFUSION TYPE OPTICAL WAVEGUIDE HAVING IMPROVED SURFACE CONDITION
Document Type and Number:
Japanese Patent JP3128332
Kind Code:
B2
Abstract:
PURPOSE: To form an optical waveguide, of which surface roughness is so low as to make the loss of the optical transmission small, by applying the ion impact treatment to the surface of a dielectric substrate previously at the time of forming an optical waveguide on the surface of a dielectric substrate with the thermal diffusing method.
CONSTITUTION: The material having the effect for improving the refraction index of a dielectric is deposited for adhesion on the surface of a dielectric substrate, and this material is diffused by heating near the surface of the substrate to form an optical waveguide. At this stage, before the adhering process, ion impact treatment is applied to the surface of the substrate in the atmosphere of the gas including the rare gas ion. With this treatment, the imperfection of crystal and the deterioration of quality is thereby improved in the surface of the dielectric substrate. The material for improving refractive index is diffused inside of the dielectric substrate by the thermal diffusing processing to be performed continuously through the surface improved layer. Simultaneously, imperfection and deterioration of the surface of the dielectric substrate are restored to the normal condition to form an optical waveguide having the excellent surface condition, for example, having the smooth surface.
Inventors:
Hirotoshi Nagata
Jun Hidaka
Junichiro Minowa
Jun Hidaka
Junichiro Minowa
Application Number:
JP17374192A
Publication Date:
January 29, 2001
Filing Date:
June 09, 1992
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
G02B6/13; G02B6/12; H01P3/16; (IPC1-7): G02B6/13
Domestic Patent References:
| JP59157602A | ||||
| JP4251804A |
Attorney, Agent or Firm:
Aoki Akira (4 outside)