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Title:
METHOD FOR FORMING IMAGE FOR PATTERN MATCHING, AND IMAGE FORMING APPARATUS FOR PATTERN MATCHING
Document Type and Number:
Japanese Patent JP2011154223
Kind Code:
A
Abstract:

To provide an image forming apparatus for pattern matching, for producing a template on the basis of design data without carrying out exposure simulation of the like, and capable of forming an image along an actual pattern.

In one embodiment, the image forming apparatus for pattern matching reduces or enlarges design data in accordance with a target pattern size on forming a matching image; and the apparatus forms an image for matching, on the basis of the reduced or enlarged pattern.


Inventors:
YANA KEIMO
ABE YUICHI
Application Number:
JP2010016159A
Publication Date:
August 11, 2011
Filing Date:
January 28, 2010
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP
International Classes:
G03F1/68; G03F1/84; G06T1/00; G06T7/00; H01L21/027; H01L21/66
Domestic Patent References:
JP2006351746A2006-12-28
JP2007005818A2007-01-11
JP2008232933A2008-10-02
JP2008224365A2008-09-25
JP2004095657A2004-03-25
JP2000266706A2000-09-29
JPH07113854A1995-05-02
JP2009198339A2009-09-03
JP2008164593A2008-07-17
JP2007218711A2007-08-30
JPS622116A1987-01-08
JP2006351746A2006-12-28
JP2007005818A2007-01-11
JP2008232933A2008-10-02
JP2008224365A2008-09-25
JP2004095657A2004-03-25
JP2000266706A2000-09-29
JPH07113854A1995-05-02
JP2009198339A2009-09-03
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda