Title:
METHOD FOR FORMING OPTICAL WAVEGUIDE
Document Type and Number:
Japanese Patent JPH05173036
Kind Code:
A
Abstract:
PURPOSE:To attain an optical integrated circuit with high performance by sufficiently reducing a loss in optical coupling. CONSTITUTION:The formation of a taper-like optical waveguide on a semiconductor substrate 1 or a dielectric substrate consists of a process (1) for laminating a lower clad layer 2 and a core layer 3 on the semiconductor substrate 1 or the dielectric substrate, a process (2) for working at least the core layer 3 out of the clad layer 2 and the core layer 3 so as to be a taper-like ridge shape which is the same shape as an etching mask 4 having a taper shape in the width direction by selective etching using the mask 4, a process (3) for applying a viscous substance to the surfaces of the layers 2, 3 or the substrate 1 after removing the mask 4, a process (4) for etching the whole surface from the upper part of the viscous substance and working the thickness of the core layer 3 like a taper, and a process (5) for laminating an upper clad layer 6 to the surfaces of the layers 2, 3.
Inventors:
KATO KAZUTOSHI
HATA SUSUMU
YOSHIDA JUNICHI
HATA SUSUMU
YOSHIDA JUNICHI
Application Number:
JP35443991A
Publication Date:
July 13, 1993
Filing Date:
December 20, 1991
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G02B6/13; G02B6/12; G02B6/122; H01L27/15; (IPC1-7): G02B6/12; H01L27/15
Attorney, Agent or Firm:
Amamiya Masaki