To improve great problems in material fracture during surface modification that deterioration in the interior of the material is caused because the amount of chemical reaction on the surface is small and a large quantity of irradiation is required for the surface modification in conventional surface modification by irradiation with charged particles in a method for forming specific chemical bonds of the material.
The method for forming the specific chemical bonds of the material by the irradiation with the charged particles comprises irradiating the material with the charged particles as particle groups composed of two or more particles and forming the chemical bonds by a specific surface phenomenon caused by the irradiation with the particle groups in the material is to be irradiated therewith.
NARUMI KAZUMASA
ARAKAWA KAZUO
HIRATA KOICHI
KOBAYASHI YOSHINORI
NAT INST OF ADV IND & TECHNOL
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shurin Sakurai