METHOD OF FORMING THIN FILM BY SPUTTERING

Title:

METHOD OF FORMING THIN FILM BY SPUTTERING

Document Type and Number:

Japanese Patent JPS5927406

Kind Code:

A

Inventors:

OKAMOTO KENJI
WAKITANI MASAYUKI
SATOU KIYOTAKE
MIURA TERUNOBU

Application Number:

JP13749182A

Publication Date:

February 13, 1984

Filing Date:

August 07, 1982

Export Citation:

Assignee:

FUJITSU LTD

International Classes:

C23C14/06; C23C14/02; H01B5/14; H01B13/00; (IPC1-7): C23C15/00; H01B5/14

Attorney, Agent or Firm:

Sadaichi Igita

Previous Patent: A fatigue-proof damage wire and a manufacturing method for the same

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