To form a region to be machined with high aspect ratio in the machining of a line using a pulsed laser beam.
A method for machining a line on a workpiece includes: a conversion step for converting the first laser beam, that is a pulsed laser, into the second laser beam which are plurality of micro laser beam groups being in close proximity or in chains along the machining direction; and a machining step for machining the surface of the workpiece by relative laser beam scanning along the machining direction, while condensing the second laser beam and irradiating it on the workpiece. A laser beam diffracted by a predetermined diffraction lattice at irradiation of the first laser beam, forms the second laser beam. In the second laser beam, the first irradiation size occupying a region to be irradiated in the machining direction is larger than the second irradiation size occupying the region to be irradiated in the direction vertical to the machining direction, and a region to be irradiated by the second laser beam, whose focal length is adjusted by a beam expanding means prepared between the diffraction grating and a condensing means, is continuously displaced along the machining direction by scanning, while condensing the second laser beam so as to maintain the irradiation size ratio.
HAYASHI NAOHISA
MASUO JUNICHI
NAGATOMO SHOHEI
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Takahiro Arita