To provide a method for manufacturing a color filter capable of preventing the color fall-off of dyes in fine cell sizes of an image sensor and obtaining necessary spectra, a solid-state imaging apparatus, and camera.
The method for manufacturing the color filter includes a step of applying and forming a negative type color resist 5, a step of applying and forming an oxygen permeation preventive film 6 in the upper part of the negative type dye color resist 5, a step of exposing a prescribed region from the upper part of the oxygen permeation preventive film 6, and a step of removing the negative type dye color resist 5 and the oxygen permeation preventive film 6 exclusive of at least the prescribed region by a developing solution and forming the color filter 15 consisting of the negative type dye color resist 5 in the prescribed region.
HARADA MITSURU