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Title:
METHOD FOR MANUFACTURING COLOR FILTER, SOLID-STATE IMAGING APPARATUS, AND CAMERA
Document Type and Number:
Japanese Patent JP2005189710
Kind Code:
A
Abstract:

To provide a method for manufacturing a color filter capable of preventing the color fall-off of dyes in fine cell sizes of an image sensor and obtaining necessary spectra, a solid-state imaging apparatus, and camera.

The method for manufacturing the color filter includes a step of applying and forming a negative type color resist 5, a step of applying and forming an oxygen permeation preventive film 6 in the upper part of the negative type dye color resist 5, a step of exposing a prescribed region from the upper part of the oxygen permeation preventive film 6, and a step of removing the negative type dye color resist 5 and the oxygen permeation preventive film 6 exclusive of at least the prescribed region by a developing solution and forming the color filter 15 consisting of the negative type dye color resist 5 in the prescribed region.


Inventors:
KOMATSU TOMOKO
HARADA MITSURU
Application Number:
JP2003433871A
Publication Date:
July 14, 2005
Filing Date:
December 26, 2003
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G02B5/20; H01L27/14; (IPC1-7): G02B5/20; H01L27/14
Attorney, Agent or Firm:
Hiromori Arai



 
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