Title:
差圧センサ及び差圧センサの製造方法
Document Type and Number:
Japanese Patent JP6986040
Kind Code:
B2
Abstract:
To provide a differential pressure sensor capable of carrying out measurement with high accuracy with a simple structure by decreasing difference in the internal volume of channels of a fluid introduced from different positions.SOLUTION: A differential pressure sensor includes: a first pedestal member 21 provided on a first case member 11; a second pedestal member 22 provided on a second case member 12; and a sensor chip 5 provided between the first pedestal member 21 and the second pedestal member 22 and detecting a pressure difference between a first fluid and a second fluid. The sensor chip 5 has a diaphragm portion 53 held between a first plate portion 51 and a second plate portion 52. A first opening 11A is formed on an outer surface of the first case member 11, and a second opening 12A is formed on an outer surface of the second case member 12. A center C between the outer surface of the first case member 11 and the outer surface of the second case member 12 matches the diaphragm portion 53. The first plate portion 51, the first pedestal member 21, and the first case member 11 and the second plate portion 52, the second pedestal member 22, and the second case member 12 are in a symmetrical structure across the diaphragm portion 53.SELECTED DRAWING: Figure 2
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Inventors:
Masashi Ogawa
Tomohiro Mukawa
Hokuei
Tomohiro Mukawa
Hokuei
Application Number:
JP2019048414A
Publication Date:
December 22, 2021
Filing Date:
March 15, 2019
Export Citation:
Assignee:
Nagano Keiki Co., Ltd.
Fukuda Co., Ltd.
Fukuda Co., Ltd.
International Classes:
G01L13/00; G01L13/02
Domestic Patent References:
| JP5831854B2 | ||||
| JP248851B2 |
Attorney, Agent or Firm:
Intellectual Property Office