Title:
METHOD FOR MANUFACTURING INORGANIC NANOTUBE
Document Type and Number:
Japanese Patent JP2004027363
Kind Code:
A
Abstract:
To provide a method for forming inorganic nanotubes by utilizing a carbon nanotube (CNT) as a template.
The method includes (a) a step of providing the template formed with CNT or CNT sequence, (b) a step of forming the inorganic nanotubes on the external side of the CNT by performing vapor deposition of inorganic materials on the template by an atomic layer deposition (ALD) method and (c) a step of obtaining the inorganic nanotubes or an inorganic nanotube sequence by the interrelated inorganic nanotubes by removing the CNT.
Inventors:
MIN YO-SEP
BAE EUN-JU
CHOI WON-BONG
CHO YOUNG-JIN
RI SHOKEN
BAE EUN-JU
CHOI WON-BONG
CHO YOUNG-JIN
RI SHOKEN
Application Number:
JP2003174325A
Publication Date:
January 29, 2004
Filing Date:
June 19, 2003
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
B82B3/00; C01B31/02; C01G55/00; C23C14/14; C23C16/01; C23C16/40; C23C16/44; C30B25/00; (IPC1-7): C23C16/01; B82B3/00; C01G55/00; C23C14/14; C23C16/40; C23C16/44
Attorney, Agent or Firm:
Isono Dozo