Title:
METHOD FOR MANUFACTURING MEMBER HAVING FINE STRUCTURE AND EXPOSURE METHOD USED FOR THE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2006330085
Kind Code:
A
Abstract:
To easily form a submicron periodical fine structure on a curved surface.
The method includes a preparation step of preparing a mask having a lattice pattern with a period P and an irradiation step of irradiating a member via the mask with light having a spectral width Δλ, wherein the distance (d) between the mask and the member is controlled to satisfy d≥2P2/Δλ in the irradiation step so as to obtain intensity distribution with a P/2 period on the member surface. Thereby, a submicron periodical fine structure can be easily formed on a curved surface.
Inventors:
YAMADA KAZUHIRO
TANAKA YASUHIRO
YAMAGATA MICHIHIRO
UMETANI MAKOTO
TAMURA TAKAMASA
TANAKA YASUHIRO
YAMAGATA MICHIHIRO
UMETANI MAKOTO
TAMURA TAKAMASA
Application Number:
JP2005149766A
Publication Date:
December 07, 2006
Filing Date:
May 23, 2005
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G03F7/20; G02B1/11; G03F1/26; G03F1/70
Domestic Patent References:
| JP2002257593A | 2002-09-11 | |||
| JP2007506210A | 2007-03-15 | |||
| JP2007523468A | 2007-08-16 | |||
| JPH1073459A | 1998-03-17 | |||
| JP2002287370A | 2002-10-03 |
Attorney, Agent or Firm:
Shiro Ogasawara