Title:
METHOD FOR MANUFACTURING METAL STRUCTURE
Document Type and Number:
Japanese Patent JP2021163898
Kind Code:
A
Abstract:
To provide a method for manufacturing a metal structure including a plurality of salients.SOLUTION: A metal structure 10 comprises a base part 12 and a plurality of fins 14. A method for manufacturing the metal structure 10 includes at least a metal layer forming step and an etching step. The metal layer forming step forms a copper layer 34 on at least one surface of a glass substrate 20 and in a salient formation schedule unit including a thorough hole 22 formed on the surface of the glass substrate. The etching step dissolves the glass substrate 20 in which a copper layer 34 is formed by bringing the glass substrate into contact with an etchant.SELECTED DRAWING: Figure 5
Inventors:
HATORI HIROTAKA
TAKEUCHI HITOSHI
TAKEUCHI HITOSHI
Application Number:
JP2020065734A
Publication Date:
October 11, 2021
Filing Date:
April 01, 2020
Export Citation:
Assignee:
NSC KK
International Classes:
C23F1/00; H01L23/36