To provide a multilayered ceramic substrate free from the occurrence of divisional defect when a multilayered assembled substrate is divided to take out a plurality of the multilayered substrates and having excellent handleabilty.
A green composite laminated body is formed by holding both upper and lower main surfaces of a green multilayered assembled substrate containing ceramic insulating material powder between shrinkage suppressing layers containing inorganic material powder which is not sintered at a sintering temperature of the ceramic insulating material powder. Notched grooves are provided on one main surface of the green composite laminated body in a depth to penetrate one of the shrinkage suppressing layers and the green multilayered assembled substrate, to reach another shrinkage suppressing layer, and not to reach another main surface of the composite laminated body. The green composite laminated body provided with the notched grooves are baked under a condition that the inorganic material powder is not sintered though the ceramic insulating material powder is sintered and after the upper and lower unsintered shrinkage suppressing layers are removed, a plurality of the multilayer ceramic substrates divided along the notched grooves are take out from the sintered multilayered assembled substrate.
SAITO YOSHIFUMI