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Title:
METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING LIQUID JETTING HEAD
Document Type and Number:
Japanese Patent JP2007173605
Kind Code:
A
Abstract:

To provide a method of manufacturing a piezoelectric element capable of improving the characteristics of a piezoelectric layer and equalizing the characteristics of the piezoelectric layer, and a method of manufacturing a liquid jetting head.

The method of manufacturing the piezoelectric element is provided with a process of forming a lower electrode 60 on a substrate 110; a process of forming a seed titanium layer 64 having a thickness of 3.5-5.5 nm on the lower electrode 60; a process of forming a piezoelectric precursor film 71 made of a piezoelectric material on the seed titanium layer 64, forming a piezoelectric layer 70 made of a piezoelectric film 72 formed by baking the piezoelectric precursor film 71 at a temperature increase rate of 50°C/sec or more and crystallizing it; and a process of forming an upper electrode on the piezoelectric layer 70.


Inventors:
MURAI MASAMI
Application Number:
JP2005370581A
Publication Date:
July 05, 2007
Filing Date:
December 22, 2005
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/055; B41J2/045; B41J2/135; B41J2/14; B41J2/145; B41J2/16; H01L41/09; H01L41/187; H01L41/22; H01L41/29; H01L41/319; H01L41/43
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka