To provide a method of manufacturing a piezoelectric vibrator with which excellent electrical characteristics is obtained by suppressing the diffusion of a bonding film during a gettering step, and also to provide an oscillator which mounts therein the piezoelectric vibrator with which excellent electrical characteristics are obtained, an electronic apparatus, and a radio wave clock.
A method of manufacturing a piezoelectric vibrator includes: a gettering step S80 in which a getter material 34 is irradiated with a first laser L1 from the outside of a base substrate 2 through the base substrate 2 and the getter material 34 is activated to adsorb a gas being existent within a cavity C; and a frequency adjusting step S90 in which weight metal films 21 formed in distal ends of vibrating arms 10, 11 of a piezoelectric vibrating piece 4 with a second laser L2 to adjust a frequency of the piezoelectric vibrating piece 4, wherein an intensity of the first laser L1 in the gettering step S80 is lower than an intensity of the second laser L2 in the frequency adjusting step S90.
Noriaki Uchino
Nobuyuki Kimura