Title:
METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR
Document Type and Number:
Japanese Patent JP2010057081
Kind Code:
A
Abstract:
To provide a piezoelectric vibrator capable of stabilizing quality by preventing a change in frequency characteristics.
A method of manufacturing a piezoelectric vibrator includes: a step of removing gas G300 generated by junction in a storage section 390 formed by joining a substrate 300 and a lid 380 to store a piezoelectric piece 370 via a through-hole 310C for forming a dummy electrode; and a step of forming a dummy electrode 415 by embedding the through-hole 310C for forming a dummy electrode so that a desired embedded material 410 is embedded in the through-hole 310C for forming a dummy electrode.
Inventors:
KOBAYASHI HIROKAZU
Application Number:
JP2008221997A
Publication Date:
March 11, 2010
Filing Date:
August 29, 2008
Export Citation:
Assignee:
KYOCERA KINSEKI CORP
International Classes:
H03H3/02; H01L23/02; H03H9/02
Attorney, Agent or Firm:
Hiroki Ohara
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