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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING PLASMA DISPLAY PANEL, AND PHOTOMASK USED FOR THE METHOD
Document Type and Number:
Japanese Patent JP2011013413
Kind Code:
A
Abstract:

To suppress generation of defects such as disconnection in a PDP pattern due to dust or the like depositing on a photomask in an exposure step, and to obtain a uniform pattern width even in a large screen with high definition.

A method for manufacturing a PDP is provided for manufacturing a plurality of PDPs having a structure on at least one substrate, and the method includes a first exposure step and a second exposure step for forming the structure, and a step of measuring a shift amount between the exposure position in the first exposure step and the exposure position in the second exposure step. An exposure position in the first exposure step or in the second exposure step upon manufacturing the subsequent plasma display panels is corrected on the basis of the measured shift amount.


Inventors:
SUZUKI MASANORI
Application Number:
JP2009156690A
Publication Date:
January 20, 2011
Filing Date:
July 01, 2009
Export Citation:
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Assignee:
PANASONIC CORP
International Classes:
G03F7/20
Attorney, Agent or Firm:
Hiroki Naito
Daisuke Nagano
Kentaro Fujii