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Title:
METHOD OF MANUFACTURING POLYMER OPTICAL WAVEGUIDE, POLYMER OPTICAL WAVEGUIDE, AND OPTICAL MODULE USING THE SAME
Document Type and Number:
Japanese Patent JP2007041122
Kind Code:
A
Abstract:

To easily manufacture a polymer optical waveguide for bending a light beam transmitting through a core in a direction opposite to a substrate.

In the method of manufacturing the polymer optical waveguide, which is provided with a core 13, a reflection surface 15 in which one end face of the core is formed into an overhanging slope to reflect a light beam transmitting through the core in the direction opposite to the substrate, and an over-clad 14 for covering the substrate including the core on a substrate 11, a sacrificial layer 21 having a slope 22 forming the reflection face 15 of the core 13 is formed on the substrate 11, a core material is formed in a part including at least the slope 22 of the sacrificial layer 21 on the substrate 11, the core 13 is formed by patterning the core material, the sacrificial layer 21 is removed to make one end face of the core 13 into the reflection surface 15, and the over-clad 14 covering the substrate 11 including the core 13 is formed on the substrate.


Inventors:
YASUDA HIRONORI
HIRANO MITSUKI
ABE TOMIYA
ITO YUZO
USHIWATARI TAKEMASA
Application Number:
JP2005222774A
Publication Date:
February 15, 2007
Filing Date:
August 01, 2005
Export Citation:
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Assignee:
HITACHI CABLE
International Classes:
G02B6/13; G02B6/122; G02B6/42; H01L31/0232; H01S5/022
Attorney, Agent or Firm:
Nobuo Kinutani