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Title:
METHOD FOR MANUFACTURING SAPPHIRE SUBSTRATE AND SAPPHIRE SUBSTRATE
Document Type and Number:
Japanese Patent JP2013179145
Kind Code:
A
Abstract:

To provide a method for manufacturing a sapphire substrate capable of shortening a manufacturing step and reducing a manufacturing cost by easily and quickly reducing unevenness of thickness of the sapphire substrate and a processing amount, and to provide the sapphire substrate.

A method for manufacturing a sapphire substrate by applying processing covering a plurality of steps to a substrate obtained by slicing a sapphire ingot includes the steps of: grinding one or both sides of a substrate 10; processing the one or both sides of the ground substrate 10 by wet blasting after the grinding step; lapping the one or both sides of the substrate 10 processed by wet blasting after the wet blasting step; and polishing the one or both sides of the lapped substrate 10 by CMP after the lapping step.


Inventors:
YOSHII MOTOYASU
Application Number:
JP2012041667A
Publication Date:
September 09, 2013
Filing Date:
February 28, 2012
Export Citation:
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Assignee:
SHARP KK
International Classes:
H01L21/304; B24B1/00
Attorney, Agent or Firm:
Patent Business Corporation Ark Patent Office