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Patent Searching and Data


Title:
METHOD OF MANUFACTURING SOLID-STATE IMAGING DEVICE
Document Type and Number:
Japanese Patent JPH05335533
Kind Code:
A
Abstract:

PURPOSE: To form readily a micro-lens which does not distinguish lens effects and which has excellent lightproof and fading-proof characteristics even in the case of a clear mold installation, etc.

CONSTITUTION: After a surface protection film 8 and a flatting layer 9 are formed on a CMD device, a transparent film 10 composed of SiO2 is formed. Next, after, a flat dividing transparent film 10a is formed in a part corresponding to a gate electrode of a CMD by an RIE method, a high refractive index film 12 composed of Si3N4 having a higher refractive index than the dividing transparent film 10a is formed on the entire surface. Next, a curved-surface-like side wall 13 is formed on the both side surfaces of the dividing transparent film 10a by the RIE method and a micro-lens is constituted of the flat dividing transparent film 10a and the curved-surface-like side wall 13.


Inventors:
MATSUMOTO KAZUYA
Application Number:
JP15896492A
Publication Date:
December 17, 1993
Filing Date:
May 27, 1992
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
G02B27/00; H01L27/14; (IPC1-7): H01L27/14; G02B27/00
Attorney, Agent or Firm:
Kenji Mogami