Title:
METHOD OF MEASURING CHARACTERISTIC OF SEMICONDUCTOR BY MICROWAVE
Document Type and Number:
Japanese Patent JPS53118373
Kind Code:
A
Inventors:
USAMI AKIRA
KONDOU IKUZOU
KATOU KAORU
KAMIDATE SHINICHI
KONDOU IKUZOU
KATOU KAORU
KAMIDATE SHINICHI
Application Number:
JP3308177A
Publication Date:
October 16, 1978
Filing Date:
March 25, 1977
Export Citation:
Assignee:
MITSUBISHI METAL CORP
TOYO SHIRIKON KK
TOYO SHIRIKON KK
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Domestic Patent References:
| JPS4740139A |