Title:
透明膜の膜厚測定方法およびその装置
Document Type and Number:
Japanese Patent JP4939304
Kind Code:
B2
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Inventors:
Kitagawa
Application Number:
JP2007137967A
Publication Date:
May 23, 2012
Filing Date:
May 24, 2007
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
International Classes:
G01B11/06; G01B9/02
Domestic Patent References:
| JP52004256A | ||||
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Foreign References:
| US20050237537 |
Attorney, Agent or Firm:
Tsutomu Sugiya
Hiroyuki Todaka
Hiroyuki Todaka