Title:
METHOD FOR PROCESSING WORKPIECE
Document Type and Number:
Japanese Patent JP2023074572
Kind Code:
A
Abstract:
To provide a method for processing a workpiece in which no large step is generated on an outer peripheral surface side of a cutting blade.SOLUTION: A method for processing a workpiece that cuts the workpiece at a dividing scheduled line includes a first cutting step and a second cutting step. In the first cutting step, a machining feed and a first indexing feed are alternately repeated. In the first indexing feed, a chuck table and a cutting blade are relatively moved in a first direction crossing the dividing scheduled line. In the second cutting step, the machining feed and a second indexing feed are alternately repeated after the first cutting step. In the second indexing feed, the chuck table and the cutting blade are relatively moved in a second direction opposite to the first direction.SELECTED DRAWING: Figure 6
Inventors:
Y KIT CHUN
Application Number:
JP2021187550A
Publication Date:
May 30, 2023
Filing Date:
November 18, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B24B27/06
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato