Title:
METHOD FOR PRODUCING APERTURE PLATE FOR NEBULIZER
Document Type and Number:
Japanese Patent JP2018158150
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an improved method for producing an aperture plate for a nebulizer.SOLUTION: In a method of manufacturing an aperture plate wafer, a photo-resist (21) is applied in a pattern of vertical columns having the dimensions of holes or pores of aperture plate to be manufactured. The mask pattern provides the apertures which define the aerosol particle size, having up to 2500 holes per one mm. There is electro-deposition of metal (22) in spaces around the columns (21). There is further application of a second photo-resist mask (25) of much larger (wider and taller) columns, including the area of first columns (21). The hole diameter in the second plating layer is chosen according to a desired flow rate.SELECTED DRAWING: Figure 6
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Inventors:
HOGAN BRENDAN
Application Number:
JP2018119753A
Publication Date:
October 11, 2018
Filing Date:
June 25, 2018
Export Citation:
Assignee:
STAMFORD DEVICES LTD
International Classes:
A61M15/00; A61M11/00; C25D1/10; C25D5/02; C25D5/12
Domestic Patent References:
| JP2004290426A | 2004-10-21 | |||
| JP2009195669A | 2009-09-03 | |||
| JP2010540526A | 2010-12-24 | |||
| JP2006150093A | 2006-06-15 |
Foreign References:
| WO2010134967A1 | 2010-11-25 | |||
| US20070277816A1 | 2007-12-06 | |||
| US20100319694A1 | 2010-12-23 | |||
| WO2011003017A1 | 2011-01-06 |
Attorney, Agent or Firm:
Shinjiro Ono
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Shigeru Sakuma
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Shigeru Sakuma