導電性ポリマーの製造方法 - Mitsubishi Chemical Corporation

Title:

導電性ポリマーの製造方法

Document Type and Number:

Japanese Patent JP7318198

Kind Code:

B2

Abstract:

To provide a conductive polymer and a production method of the conductive polymer, and a conductive composition and a production method of the composition, from which a conductive film can be formed that less likely causes a patterning failure when the film is formed on a resist layer and subjected to patterning by use of a charged particle beam.SOLUTION: The conductive polymer of the present invention has an acidic group, in which each content of Na, K, Mg, Ca, Cr, Fe, Ni, Cu and Zn is 10 ppm by mass or less. The production method of the conductive polymer of the present invention includes a step of polymerizing a raw material monomer of the conductive polymer in the presence of a polymerization solvent and an oxidizing agent. In the method, each of the polymerization solvent, the oxidizing agent and the raw material monomer used has each content of Na, K, Mg, Ca, Cr, Fe, Ni, Cu and Zn of 1000 ppm by mass or less, or otherwise, a reaction product obtained by polymerizing the raw material monomer is purified by bringing the product into contact with an ion exchange resin until each content of Na, K, Mg, Ca, Cr, Fe, Ni, Cu and Zn in the reaction product is reduced to 10 ppm by mass or less.SELECTED DRAWING: None

Inventors:

Masashi Uzawa

Application Number:

JP2018220386A

Publication Date:

August 01, 2023

Filing Date:

November 26, 2018

Export Citation:

Click for automatic bibliography generation Help