To provide a method which can efficiently control the crystal orientation of a perovskite structure oxide thin film and easily provide a high-grade tetragonal perovskite structure oxide thin film.
The perovskite structure oxide thin film having a tetragonal crystal structure and a single crystal orientation of (001), (101) or (111) on the (111) face or the (100) face of a substrate which has a metal fluoride having a fluorite-type crystal structure as the main component is produced (here, the case is excluded where it has the single crystal orientation of (001) on the (100) face). The substrate which has a metal fluoride having a fluorite-type crystal structure as the main component can be controlled in its lattice constants by replacing a part of metal site or F site with another element.
FUJISAWA TAKASHI
UTSUGI MANABU
KAWAME NAOYUKI
CANON OPTRON INC
Takashi Ishida
Tetsuji Koga
Atsushi Ebiya
Yoshihiro Kobayashi
Goji Tasaki