Title:
METHOD OF PURIFYING GASEOUS NITROGEN TRIFLUORIDE
Document Type and Number:
Japanese Patent JP2003286013
Kind Code:
A
Abstract:
To provide an industrial method for adsorption purifying nitrogen trifluoride from CF4 as impurity, to increase the chemical stability of an adsorbent and to extend its operating period.
The method of purifying gaseous nitrogen trifluoride containing CF4 as impurity includes: selective adsorption of nitrogen trifluoride by dehydrated crystalline porous synthetic zeolite; displacement of carbon tetrafluoride by inert gas; and desorption and concentration of the purified nitrogen trifluoride. The method for purifying gaseous nitrogen trifluoride is carried out by using synthetic zeolite erionite having oval pores of maximum and minimum diameters of 5.2 and 3.5 , respectively, in the capacity.
Inventors:
IGUMNOV SERGEI MIKHAILOVICH
KHARITONOV VALERY PAVLOVICH
KHARITONOV VALERY PAVLOVICH
Application Number:
JP2003047662A
Publication Date:
October 07, 2003
Filing Date:
February 25, 2003
Export Citation:
Assignee:
ZAKRYTOE AKTSIONERNOE OBSCHEST
International Classes:
B01D53/02; B01D53/04; B01J20/18; B01J20/28; C01B21/083; (IPC1-7): C01B21/083; B01D53/04; B01J20/18; B01J20/28
Attorney, Agent or Firm:
Aoyama Ryo (2 outside people)