METHOD FOR SPLITTING GLASS PLATE

Title:

METHOD FOR SPLITTING GLASS PLATE

Document Type and Number:

Japanese Patent JP2003002674

Kind Code:

A

Abstract:

To provide a method for splitting a glass plate capable of accurately splitting the glass plate from both sides without providing an alignment mark when splitting the glass plate provided with only an antireflective film.

This method for splitting a glass plate comprises the steps of forming a first dicing groove 31 on the surface provided with the antireflective film 12 of the glass plate 10, adhering an adhesive tape 22 on the surface on which the first dicing groove 31 is formed, irradiating the glass plate 10 on which the adhesive tape 22 is adhered with light, detecting the position of the first dicing groove 31 by reflected or transmitted light from the glass plate 10 and forming a second dicing groove 32 along the first dicing groove 31 on the surface of the glass plate 10 opposite to the surface on which the first dicing groove 31 is formed.

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Inventors:

ONISHI ICHIRO
HARA KAZUHIRO
MATSUDA TAKEO

Application Number:

JP2001188180A

Publication Date:

January 08, 2003

Filing Date:

June 21, 2001

Export Citation:

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Assignee:

SEIKO EPSON CORP

International Classes:

C03B33/02; C03B33/037; C03B33/07; (IPC1-7): C03B33/02; C03B33/037

Domestic Patent References:

JPH09141646A	1997-06-03
JP2000001326A	2000-01-07

Attorney, Agent or Firm:

Masanori Ueyanagi (1 outside)

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