Title:
ガス供給システムにおける過酸化水素の分解を抑制する方法、システム、および装置
Document Type and Number:
Japanese Patent JP7141395
Kind Code:
B2
Abstract:
Provided herein are methods, systems, and apparatus for inhibiting decomposition of hydrogen peroxide gas through use of surface modification of production and delivery components.
Inventors:
Ramos, Christopher
Heidin, edward
Web, scene
Jeffrey Spiegelman
Holmes, Russell
Daniel, Alvarez
Heidin, edward
Web, scene
Jeffrey Spiegelman
Holmes, Russell
Daniel, Alvarez
Application Number:
JP2019528519A
Publication Date:
September 22, 2022
Filing Date:
November 16, 2017
Export Citation:
Assignee:
RASIRC, INC.
International Classes:
H01L21/304; B01J4/00; C01B15/017
Domestic Patent References:
| JP2016521236A | ||||
| JP2001272757A | ||||
| JP2011125788A | ||||
| JP2004223244A | ||||
| JP9064008A | ||||
| JP2019521948A | ||||
| JP2015514005A | ||||
| JP2006186081A | ||||
| JP5217987A |
Foreign References:
| US20150190736 | ||||
| WO2016065132A1 | ||||
| US20150329901 | ||||
| US20150068611 |
Attorney, Agent or Firm:
Patent business corporation Kita Aoyama International