To provide a method and system, by which many semiconductor manufacturing apparatuses can be controlled with high accuracy by collecting various data from the devices via a communication network and feeding back analyzed results to the devices, after performing statistical processings.

This semiconductor manufacturing device control system is constituted of a network 5 and the semiconductor manufacturing apparatus 201 and a server 10, both of which are connected to the network 5. The server 10 is constituted of a means 3a, which collects and stores measurement data about the states of the devices 210, a means 3b which calculates the analyzed results by performing the statistic processing, based on the collected measurement data, and a means 3c which transmits the analyzed results to the devices 201 via the network 5.