Title:
METHOD OF TESTING TAPE CARRIER
Document Type and Number:
Japanese Patent JPH01171235
Kind Code:
A
Abstract:
PURPOSE:To ensure correct and reliable test of electric characteristics of an IC chip mounted on a tape carrier, by blowing air containing ions against the tape carrier prior to conducting the test. CONSTITUTION:Prior to testing a tape carrier 2 carrying an IC chip 4, the IC chip 4 and the tape carrier 2 should be previously freed of contaminants adhered thereon or static electricity. Clean air is supplied to an ionizer 21 from an air supplier 20. A high voltage is applied between opposing electrodes so as to ionize oxygen in the supplied air. Air gas containing the ionized oxygen is fed to an air nozzle 22 through a tube 23, while contaminants such as dust contained in the air are removed approximately perfectly by a cartridge filter 24. The air containing the ionized oxygen is blown from the nozzle 22 against the tape carrier 2 carrying the IC chip 4, whereby any contaminants adhered thereon are blown off and static electricity is electrically neutrized by the ionized oxygen to zero charge.
Inventors:
ABE YUICHI
Application Number:
JP33361487A
Publication Date:
July 06, 1989
Filing Date:
December 25, 1987
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/66; (IPC1-7): H01L21/66