Title:
高誘電性ナノシート積層体、高誘電性ナノシート積層体、高誘電体素子、および高誘電体薄膜素子の製造方法
Document Type and Number:
Japanese Patent JP5885150
Kind Code:
B2
Abstract:
A high dielectric nanosheet laminate is produced by laminating nanosheets, each of which has a thickness of 10 nm or less and is formed of an oxide that has a perovskite structure wherein at least four NbO6 octahedrons, TaO6 octahedrons or TiO6 octahedrons are included in a unit lattice. Consequently, the high dielectric nanosheet laminate is capable of achieving a high dielectric constant and a satisfactory insulation property, which are preferable for high dielectric nanosheet multilayer capacitors or the like, at the same time even if formed very thin.
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Inventors:
Minoru Nagata
Ebina Yasuo
Takayoshi Sasaki
Ebina Yasuo
Takayoshi Sasaki
Application Number:
JP2011112462A
Publication Date:
March 15, 2016
Filing Date:
May 19, 2011
Export Citation:
Assignee:
National Institute for Materials Science
International Classes:
C01G33/00; B32B9/00; H01L21/336; H01L21/822; H01L21/8242; H01L27/04; H01L27/108; H01L29/78; H01L29/786
Domestic Patent References:
| JP2000114093A | ||||
| JP11139826A |
Foreign References:
| WO2008078652A1 | ||||
| WO2009142325A1 |
Other References:
李宝文, 他4名,レイヤーバイレイヤー累積によるペロブスカイト型ナノシート超薄膜の構築とその電気特性,日本化学会第89春季年会-講演予稿集 I,2009年 3月13日,p. 734