Title:
ガス放電レーザの出力光の干渉性を低減させる方法及び装置
Document Type and Number:
Japanese Patent JP5739601
Kind Code:
B2
Abstract:
A method includes directing a portion of a laser beam output from a laser along a secondary beam path toward a detector, the secondary beam path being distinct from a main beam path of the laser beam; generating a bandwidth selective interference pattern of the laser beam on the detector; detecting, at the detector, a width of a fringe within the interference pattern to thereby measure measuring a bandwidth of the laser beam; and homogenizing the laser beam traveling along the secondary beam path prior to generation of the bandwidth selective interference pattern. The homogenizing includes diffusing the laser beam; and introducing a time dependent, position dependent, or both time and position dependent random modulation to the wavefront of the laser beam to reduce fluctuations in the detected fringe width and to reduce the influence of spatial coherence of the laser beam on the detected interference pattern.
Inventors:
La Fuck Robert Jay
Smith scott tea
Smith scott tea
Application Number:
JP2007519267A
Publication Date:
June 24, 2015
Filing Date:
June 17, 2005
Export Citation:
Assignee:
Cymer Limited Liability Company
International Classes:
H01S3/10; G01J3/02; G01J3/26; G01J9/02; G02B5/04; G02B5/28; G02B27/48; G03F7/20; H01L21/027; H01S3/08; H01S3/22; G01J1/42; G01J3/12; H01S3/00
Domestic Patent References:
| JP1319727A | ||||
| JP5042499A | ||||
| JP2001147402A | ||||
| JP2002277328A | ||||
| JP6208089A | ||||
| JP2004518954A | ||||
| JP2000206449A | ||||
| JP3029802A |
Foreign References:
| WO2000030163A1 | ||||
| WO2003107494A1 | ||||
| US20020048294 | ||||
| US20010013933 | ||||
| US20030210399 | ||||
| US6317448 | ||||
| US6320663 | ||||
| US6081381 | ||||
| US5159478 | ||||
| US6016197 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Oura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Oura