METHODS OF MANUFACTURING ELECTROSTATIC ACTUATOR, LIQUID DROPLET DISCHARGING HEAD AND LIQUID DROPLET DISCHARGING DEVICE

Title:

METHODS OF MANUFACTURING ELECTROSTATIC ACTUATOR, LIQUID DROPLET DISCHARGING HEAD AND LIQUID DROPLET DISCHARGING DEVICE

Document Type and Number:

Japanese Patent JP2007336660

Kind Code:

A

Abstract:

To provide a method of manufacturing an electrostatic actuator by which an electrostatic actuator having high discharging characteristics and drive durability can be manufactured by suppressing the deposition of metallic impurities, and to provide methods of manufacturing a liquid droplet discharging head and a liquid droplet discharging device.

The method has a step of forming a boron dope layer on one surface of a Si substrate 41 using boron diffusion sources 51 and in which the boron dope layer is formed as a vibrating plate by an etching stop technology. The boron diffusion source that has B2O3as a main component and Rh content of ≤0.44 ppm is used as the boron diffusion source 51 when the boron dope layer is formed.

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Inventors:

KOMATSU HIROSHI

Application Number:

JP2006164339A

Publication Date:

December 27, 2007

Filing Date:

June 14, 2006

Export Citation:

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Assignee:

SEIKO EPSON CORP

International Classes:

H02N1/00; B41J2/16

Domestic Patent References:

JP2006082380A	2006-03-30
JP2002539615A	2002-11-19
JPH09181010A	1997-07-11

Attorney, Agent or Firm:

Hisao Kobayashi
Kiyoshi Yasushima
Souji Sasaki
Noboru Omura
Takanashi Norio

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