Title:
欠陥を分類するための方法およびウエハ検査ツール
Document Type and Number:
Japanese Patent JP6576342
Kind Code:
B2
Abstract:
Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
Inventors:
Cheng Chiang-Fay Adam
Maher Christopher
Huett Patrick
Energy Thai-Kang
Jordan John Earl Third
Maher Christopher
Huett Patrick
Energy Thai-Kang
Jordan John Earl Third
Application Number:
JP2016528142A
Publication Date:
September 18, 2019
Filing Date:
November 03, 2014
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01L21/66; G01N21/93; G01N21/956
Domestic Patent References:
| JP2004047939A | ||||
| JP2011254084A | ||||
| JP2009103508A |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office