Title:
計測学ツール較正方法および装置
Document Type and Number:
Japanese Patent JP4620048
Kind Code:
B2
Abstract:
A method and apparatus for calibrating a metrology tool are disclosed. The apparatus includes a substrate having at least one calibration site formed thereon. The calibration site includes a pattern of cells that have at least one feature disposed in a surface of the substrate. The feature provided for measurement by a step height metrology tool and a phase metrology tool to calibrate the step height and phase metrology tools.
Inventors:
Hughes, Gregari, Pee
Application Number:
JP2006520391A
Publication Date:
January 26, 2011
Filing Date:
July 16, 2004
Export Citation:
Assignee:
Toppan, foutamasks, ink
International Classes:
G01B11/02; G01Q40/02; G01Q60/24; G01R31/26; G03F1/00; G03F7/20; H01L21/027
Domestic Patent References:
| JP9014929A | ||||
| JP9145329A | ||||
| JP7325013A | ||||
| JP11304822A | ||||
| JP7287023A |
Attorney, Agent or Firm:
Yuzo Sanada
Ohara Shizuo
Ohara Shizuo